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Semiconductor Pumps
 
 

FA Series - Pneumatic Drive Bellows Pump 

The right pump for the right job. The FA Series bellows pump addresses low flow and high flow requirements at low to medium temperatures (5 to 100°C). The FA-2E pump is for precise chemical delivery for flow rates up to 0.5 gpm (2 L/min). The FA-40 pump is excellent for applications requiring high volume flow, such as large wafer processing, delivering up to 11.6 gpm (50 L/min). The FA-40 is constructed vertically to optimize precious cabinet space.

All liquid ends are constructed of fluoropolymers for purity and corrosion resistance. The PTFE bellows are rugged and proven to withstand long term continuous operation and high pressure resistance better than any other pump.

Leak detection and drive sensing enhance the reliability and safety of these pneumatic pumps.
 

 
  FA2E FA-40VEW
Maximum discharge capacity 0.5 GPM (2 LPM) 10.6 GPM(20 LPM)
Maximum stroke speed 150 spm 80 spm
Liquid temperature range 41-212°F (5-100°C) 68-212°F (20-100°C)
Maximum air supply pressure 57 psi (4 kg/cm2) 57 psi (4 kg/cm2)
Maximum air consumption 13.2 CFM (50 NL/min) 7.1 CFM (200 NL/min)
Pump connection size PFA 3/8" PFA 1"
Supply air connection size* PT 1/4" PT 3/8"
* NPT conversion fittings available

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